Integrated Electrochemical SensorsIon Sensitive Field Effect Transistor (ISFET) for pH measurementsTa2O5 insulating gate Ion Sensitive Field Effect Transistor (ISFET) devices measure the pH value in a wide range from basic to acidic solutions. The ISFET devices are realized with microelectronic technology compatible with CMOS processes allowing a wafer based sensor production. Sensing Principle Amperometric sensor for HOCl measurementsThe integrated amperometric chlorine sensor is realized on silicon using microelectronic compatible processes. The thin film platinum working and counter electrodes as well as the silver/silver chloride reference-electrode are deposited on an electrically insulating silicon nitride layer. Sensing Principle |
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